| Product description |
With plasma as the heat source, high purity high density ZrOx targets are produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.
| Item | Specifications | Testing method |
| Purity (%) | ≥99.9 | |
| Density (g/cm3 ) | ≥5.4 | Archimedes densimeter |
| Impurities content (ppm) | Al: ≤100 Cr: ≤50 Ti: ≤100 Fe: ≤200 Total impurity: ≤1000 | ICP Oxygen and nitrogen analyzer |
| Electrical resistivity (Ω?cm) | ≤0.5 | Four-probe resistivity meter |
| Dimension | |
According to customized drawings.
| Backing tube | |
304/316L stainless steel (non-magnetic).
| Applications | |
- AR films of optical glasses
- Low-E glasses
- Tool and decorative coatings
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