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              TiOx Target

                  Product description

              With plasma as the heat source, high purity high density TiOx targets are produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.

              Item

              Specifications

              Testing method


              Purity (%)


              ≥99.9


              Density (g/cm3 )

              ≥4.0

              Archimedes densimeter

              Impurities content

              (ppm)


              SiO2: ≤100

              P2O5: ≤10  

              SO2: ≤60

              Cu: ≤18

              Fe: ≤80   

              Total impurity: ≤1000


              ICP

              Oxygen and nitrogen analyzer

              Electrical resistivity (Ω?cm)

              ≤0.5

              Four-probe resistivity meter

                 

              Dimension


              According to customized drawings.

                 

              Backing tube 



              304/316L stainless steel (non-magnetic).

                 

              Applications


              - AR films of optical glasses

              - Low-E glasses

              - Tool and decorative coatings


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