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              NbOx Target

                  Product description

              With plasma as the heat source, high purity high density NbOx targets are produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings. 

              Item

              Specifications

              Testing method

              Purity (%) 

              ≥99.9


              Density (g/cm3 )

              ≥4.7

              Archimedes densimeter

              Impurities content

              (ppm)

              Ta≤200


              Si≤80

              Fe≤80

              Al≤30

              W≤30

              Cu: ≤30

              Total impurity≤1000 


              ICP

              Oxygen and nitrogen analyzer

              Electrical resistivity (Ω?cm)

              ≤0.2

              Four-probe resistivity meter

              Recommended power (kw/m)

              15
                 

              Dimension


              According to customized drawings.

                 

              Backing tube 



              304/316L stainless steel (non-magnetic).

                 

              Applications


              Low-E glasses, electrodes of thin film solar cells, TFT-LCD, semiconductor devices.

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