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              The excellent target materials used for decoration/functional coating are as follows:

              Materials Formula Scale Purity Rotation Flat
              Indium tin oxide Indium Tin Oxide In203 In203/Sn02 10wt% 3N.4N
              Niobium oxide Niobium Oxide 3N5
              silver Silver 3N7
              niobium Niobium 2N7
              silicon Silicon 4N,5N
              aluminum Aluminum 3N.4N
              chromium Chromium 2N5-4N
              copper Copper
              molybdenum Molybdenum 3N5
              Tungsten titanium Tungsten Titanium 3N
              Molybdenum niobium Molybdenum Niobium 3N5
              Aluminum Alloy Aluminum Alloy
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