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              應用于裝飾/功能鍍膜的靶材如下:

              材料 化學式 比例 純度 旋轉 平面
              鋁合金 Aluminum Alloy
              鉬鈮 Molybdenum Nobium 3N5
              鎢鈦 Tungsten Titanium 3N
              Molybdenum 3N5
              Copper
              Chromium 2N5-4N
              Aluminum 3N.4N
              Silicon 4N. 5N
              Niobium 2N7
              Silver 3N7
              氧化鈮 Niobium oxide 3N5
              氧化銦錫 Indium Tin Oxide In203/Sn02 10wt% 3N. 4N
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